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Microelectronic Characterization Laboratory

Sponsored by: Air Force Office of Scientific Research and (AFOSR) and Missile Defense Agency (MDA) 

The experimental facilities in the characterization laboratory include impedance spectroscopy, C-V analysis, and Scanning Electron Microscopy with Energy Dispersive Spectroscopy (SEM-EDS). A wide range of semiconducting materials and devices are characterized in this laboratory. The impedance spectroscopy is accomplished via HP4192A LF Impedance Analyzer covering frequency range 5 Hz through 13 MHz. The HP4145 C-V Analyzer is capable of providing Mott-Schottky data for nonlinear devices. The state-of-the-art JEOL 6610 SEM and Oxford EDS system is used for analyzing materials and devices including elemental analysis. The characterization laboratory is extensively used by students to accomplish their Senior Design projects.